Significant reduction in power consumption! Chemical solution temperature control system
By directly controlling the temperature of the drug solution flow tube, we can reduce power consumption by 95% compared to conventional indirect temperature control methods!
Temperature management of the cleaning solution used in semiconductor manufacturing processes is a crucial factor that affects product quality and productivity. This device, which uses a Peltier module, controls the temperature of the cleaning solution to within ±0.05°C. It is a very compact module that directly controls the temperature of the flow path tube, allowing for a reduction in usage by 10-30% compared to traditional methods that use a tank to regulate the solution's temperature. Furthermore, due to its simple structure with no moving parts, it operates without vibration or noise and requires almost no maintenance. ● For more details, please contact us.
- Company：エムエス機器
- Price：Other
